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Proceedings Paper

Multiphoton laser lithography for the fabrication of plasmonic components
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Paper Abstract

In this contribution, we demonstrate multi-photon femtosecond laser lithography for the fabrication and rapid prototyping of plasmonic components. Using this technology different dielectric and metallic SPP-structures can be fabricated in a low-cost and time-efficient way. Resolution limits of this technology will be discussed. Investigations of the optical properties of the fabricated SPP-structures by far-field leakage radiation microscopy will be reported.

Paper Details

Date Published: 11 September 2006
PDF: 10 pages
Proc. SPIE 6324, Plasmonics: Nanoimaging, Nanofabrication, and their Applications II, 63240U (11 September 2006); doi: 10.1117/12.680418
Show Author Affiliations
Sven Passinger, Laser Zentrum Hannover e.V. (Germany)
Jürgen Koch, Laser Zentrum Hannover e.V. (Germany)
Roman Kiyan, Laser Zentrum Hannover e.V. (Germany)
Carsten Reinhardt, Laser Zentrum Hannover e.V. (Germany)
Boris N. Chichkov, Laser Zentrum Hannover e.V. (Germany)


Published in SPIE Proceedings Vol. 6324:
Plasmonics: Nanoimaging, Nanofabrication, and their Applications II
Satoshi Kawata; Vladimir M. Shalaev; Din Ping Tsai, Editor(s)

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