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Proceedings Paper

Dark-field image of full-field transmission hard x-ray microscope in 8-11 keV
Author(s): Gung-Chian Yin; Fred Duewer; Xianghui Zeng; Alan Lyon; Wenbing Yun; Fu-Rong Chen; K. S. Liang
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Paper Abstract

We have demonstrated dark-field imaging using a full-field hard x-ray microscope by using a custom capillary-based condenser. The condenser provides illumination with a numeric aperture about 3-mrad with high efficiency. This high illumination angle allows full-resolution imaging using a 50 nm hard x-ray zone plate. The zeroth order beam from the condenser is well out of the zoneplate range - which allows a high signal-to-noise ratio in the image plane. Small particles with high scattering power, such as colloidal gold markers used in biology are well-suited for dark-field imaging. Combining with high brightness source from NSRRC BL01B, the dark field image can be acquired within several minutes with high contrast ratio. In this paper, the dark field image of IC and the zoneplate defect will be demonstrated and studied in different energy under dark field mode.

Paper Details

Date Published: 29 August 2006
PDF: 8 pages
Proc. SPIE 6317, Advances in X-Ray/EUV Optics, Components, and Applications, 631703 (29 August 2006); doi: 10.1117/12.680216
Show Author Affiliations
Gung-Chian Yin, National Synchrotron Radiation Research Ctr. (Taiwan)
National Chiao Tung Univ. (Taiwan)
Fred Duewer, Xradia Inc. (United States)
Xianghui Zeng, Xradia Inc. (United States)
Alan Lyon, Xradia Inc. (United States)
Wenbing Yun, Xradia Inc. (United States)
Fu-Rong Chen, National Synchrotron Radiation Research Ctr. (Taiwan)
National Tsing Hua Univ. (Taiwan)
K. S. Liang, National Synchrotron Radiation Research Ctr. (Taiwan)

Published in SPIE Proceedings Vol. 6317:
Advances in X-Ray/EUV Optics, Components, and Applications
Ali M. Khounsary; Christian Morawe, Editor(s)

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