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Proceedings Paper

Development of Mg/SiC multilayer mirrors
Author(s): Go Murakami; Kazuo Yoshioka; Ichiro Yoshikawa
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Paper Abstract

A multilayer coating mirror of Mo/Si is usually used for space science in the spectral range of extreme ultraviolet (EUV), especially for He-II (30.4 nm) radiation, because it is highly stable under vacuum and atmosphere. It has the fairly high reflectivity of 15-20%. But the space science community needs the coating of higher reflectivity at 30.4 nm radiation for the future satellite missions, especially for the small satellite (to reduce the size of optics). In this work, for developing a new multilayer mirror for He-II radiation, we report the performance of a multilayer consisting of Mg/SiC and the aging in reflectivity under atmosphere and vacuum.

Paper Details

Date Published: 29 August 2006
PDF: 8 pages
Proc. SPIE 6317, Advances in X-Ray/EUV Optics, Components, and Applications, 631714 (29 August 2006); doi: 10.1117/12.679965
Show Author Affiliations
Go Murakami, The Univ. of Tokyo (Japan)
Kazuo Yoshioka, The Univ. of Tokyo (Japan)
Ichiro Yoshikawa, The Univ. of Tokyo (Japan)


Published in SPIE Proceedings Vol. 6317:
Advances in X-Ray/EUV Optics, Components, and Applications
Ali M. Khounsary; Christian Morawe, Editor(s)

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