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Proceedings Paper

Analysis of systematic errors in spatial carrier phase shifting applied to interferogram intensity modulation determination
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Paper Abstract

This work is devoted to two-beam interferogram intensity modulation decoding using spatial carrier phase shifting interferometry. Single frame recording, simplicity of experimental equipment and uncomplicated data processing are the main advantages of the method. A comprehensive analysis of the influence of systematic errors (spatial carrier miscalibration, non-uniform average intensity profile, nonlinear recording) on the modulation distribution determination using automatic fringe pattern analysis techniques is presented. The results of searching for optimum calculation algorithm are described. Extensive numerical simulations are compared with laboratory findings obtained when testing vibrating silicon microelements under various experimental conditions.

Paper Details

Date Published: 14 August 2006
PDF: 12 pages
Proc. SPIE 6292, Interferometry XIII: Techniques and Analysis, 62920A (14 August 2006); doi: 10.1117/12.679058
Show Author Affiliations
Adam Styk, Warsaw Univ. of Technology (Poland)
Krzysztof Patorski, Warsaw Univ. of Technology (Poland)


Published in SPIE Proceedings Vol. 6292:
Interferometry XIII: Techniques and Analysis
Katherine Creath; Joanna Schmit, Editor(s)

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