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Proceedings Paper

A gap sensing technique based on surface plasmon resonance
Author(s): Pao Tung Wu; Meng Chyi Wu; Chien Ming Wu
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Paper Abstract

A nanometer-scale gap sensing technique based on surface plasmon resonance principle is presented. A simulation to the gap sensing technique and an experimental setup to verify the simulation results have both done in this study. For simulation, Fresnel's equation was used to derive the multilayer reflectivity of KR configuration of SPR devices. The results show that the resonance angle increased when the air gap, which was within half a wavelength, between the SPR device and the glass slide was decreased. For experiment, we measured the reflectivity versus incident angle. The results verify the theoretical prediction. Utilizing this novel surface plasmon resonance gap sensing technique, we have measured an air gap down to 100 nm. The technique is better than the other methods used in nanometer-scale gap measurements.

Paper Details

Date Published: 30 August 2006
PDF: 9 pages
Proc. SPIE 6324, Plasmonics: Nanoimaging, Nanofabrication, and their Applications II, 632415 (30 August 2006); doi: 10.1117/12.679054
Show Author Affiliations
Pao Tung Wu, National Tsing Hua Univ. (Taiwan)
Meng Chyi Wu, National Tsing Hua Univ. (Taiwan)
Chien Ming Wu, National Tsing Hua Univ. (Taiwan)


Published in SPIE Proceedings Vol. 6324:
Plasmonics: Nanoimaging, Nanofabrication, and their Applications II
Satoshi Kawata; Vladimir M. Shalaev; Din Ping Tsai, Editor(s)

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