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Proceedings Paper

Fabrication of photonic structure on lithium niobate by means of interferometric lithography and wet etching
Author(s): Chang-Hung Chiang; ChengWei Chien; Jyh-Chen Chen
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Proc. SPIE 6327, Nanoengineering: Fabrication, Properties, Optics, and Devices III, 632713; doi: 10.1117/12.678973
Show Author Affiliations
Chang-Hung Chiang, National Central Univ. (United States)
ChengWei Chien, National Central Univ. (Taiwan)
Jyh-Chen Chen, National Central Univ. (Taiwan)


Published in SPIE Proceedings Vol. 6327:
Nanoengineering: Fabrication, Properties, Optics, and Devices III
Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

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