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Proceedings Paper

Fabrication of dense wavelength division multiplexing filters with large useful area
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Paper Abstract

Dense Wavelength Division Multiplexers (DWDM), a kind of narrow band-pass filter, are extremely sensitive to the optical thickness error in each composite layer. Therefore to have a large useful coating area is extreme difficult because of the uniformity problem. To enlarge the useful coating area it is necessary to improve their design and their fabrication. In this study, we discuss how the tooling factors at different positions and for different materials are related to the optical performance of the design. 100GHz DWDM filters were fabricated by E-gun evaporation with ion-assisted deposition (IAD). To improve the coating uniformity, an analysis technique called shaping tooling factor (STF) was used to analyze the deviation of the optical thickness in different materials so as to enlarge the useful coating area. Also a technique of etching the deposited layers with oxygen ions was introduced. When the above techniques were applied in the fabrication of 100 GHz DWDM filters, the uniformity was better than +/-0.002% over an area of 72 mm in diameter and better than +/-0.0006% over 20mm in diameter.

Paper Details

Date Published: 28 August 2006
PDF: 11 pages
Proc. SPIE 6286, Advances in Thin-Film Coatings for Optical Applications III, 62860E (28 August 2006); doi: 10.1117/12.678915
Show Author Affiliations
Cheng-Chung Lee, National Central Univ. (Taiwan)
Sheng-Hui Chen, National Central Univ. (Taiwan)
Jin-Cherng Hsu, Fu-Jen Catholic Univ. (Taiwan)
Chien-Cheng Kuo, National Central Univ. (Taiwan)


Published in SPIE Proceedings Vol. 6286:
Advances in Thin-Film Coatings for Optical Applications III
Michael J. Ellison, Editor(s)

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