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Proceedings Paper

Design of 4"-high spatial resolution interferometer
Author(s): Gui-ping Shen; Qiao Xu; Xiangyang Lei
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Paper Abstract

The goal of this 4" phase shifting Fizeau interferometer design is to measure the small scale deformations of the optical surface down to 0.1 millimeter in 100 millimeter diameter. In this paper, the factors of affecting the wavefront information testing in medium and high frequencies are analyzed. The general description of the 4" high spatial resolution interferometer is provided and the design of the major optical components in the interferometer is described. Finally, the interferograms of such kind of high spatial resolution interferometer producing are showed, and the last result is analyzed.

Paper Details

Date Published: 23 February 2006
PDF: 6 pages
Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 615039 (23 February 2006); doi: 10.1117/12.678603
Show Author Affiliations
Gui-ping Shen, Chengdu Fine Optical Engineering Research Ctr. (China)
Qiao Xu, Chengdu Fine Optical Engineering Research Ctr. (China)
Xiangyang Lei, Chengdu Fine Optical Engineering Research Ctr. (China)


Published in SPIE Proceedings Vol. 6150:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Xun Hou; Jiahu Yuan; James C. Wyant; Hexin Wang; Sen Han, Editor(s)

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