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Proceedings Paper

Identifying of template's parallelism in nanoimprint lithography
Author(s): Hongzhong Liu
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Proc. SPIE 6294, Infrared and Photoelectronic Imagers and Detector Devices II, ; doi: 10.1117/12.678221
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Hongzhong Liu, Xi'an Jiaotong Univ. (China)


Published in SPIE Proceedings Vol. 6294:
Infrared and Photoelectronic Imagers and Detector Devices II
Randolph E. Longshore; Ashok Sood, Editor(s)

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