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Proceedings Paper

Study on optical confocal probe based on time difference measurement with no reference path
Author(s): Yuming Fan; Shuzhong Zhao; Junfeng Ren; Guoxiong Zhang
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Paper Abstract

On the basis of the measuring principle of dynamic active optical confocal probe based on time difference measurement that has a reference path, a dynamic active optical confocal probe based on time difference measurement without reference path is developed. In this paper, the working principle of this optical confocal probe is dissertated. A large-scale integrated measuring system is designed to simplify the structure of the probe and to enhance the stability of the probe. At the end of the paper, experiments about the performance test of the optical confocal probe based on time difference measurement with no reference path is carried out. Experiment results show that the probe has a measuring resolution of 0.1μm, a measuring range of 0.2mm and a linearity of 0.4μm.

Paper Details

Date Published: 19 May 2006
PDF: 6 pages
Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61501Q (19 May 2006); doi: 10.1117/12.678104
Show Author Affiliations
Yuming Fan, Tianjin Univ. (China)
Shuzhong Zhao, Tianjin Univ. (China)
Hebei Polytechnic Univ. (China)
Junfeng Ren, Tianjin Univ. (China)
Guoxiong Zhang, Tianjin Univ. (China)


Published in SPIE Proceedings Vol. 6150:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Xun Hou; Jiahu Yuan; James C. Wyant; Hexin Wang; Sen Han, Editor(s)

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