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Proceedings Paper

A white-light interferometer for inner cylindrical surfaces
Author(s): A. Albertazzi G.; M. R. Viotti; A. Dal Pont
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Paper Abstract

This paper introduces a new design of a white light interferometer, suitable for measurement of inner cylindrical or quasi-cylindrical parts. A high precision 45° conical mirror is used to direct collimated light in the radial direction to the surface to be measured. The image of the measured surface, distorted by the conical mirror, is formed in the sensor plane of a digital camera. A mapping algorithm is used to reconstruct the cylindrical geometry from the distorted image. The remaining of the interferometer is quite similar to a conventional white light interferometer, where a flat reference mirror is scanned through the measurement range while an algorithm is searching for the maximum contrast position of the interference pattern. The alignment and calibration of the interferometer using a reference master piece are described and discussed. The performance evaluation of the interferometer as well as practical applications are also presented and discussed. This new configuration makes possible to measure inner surfaces in true cylindrical coordinates.

Paper Details

Date Published: 14 August 2006
PDF: 8 pages
Proc. SPIE 6293, Interferometry XIII: Applications, 62930F (14 August 2006); doi: 10.1117/12.678050
Show Author Affiliations
A. Albertazzi G., Federal Univ. of Santa Catarina (Brazil)
M. R. Viotti, Federal Univ. of Santa Catarina (Brazil)
A. Dal Pont, Federal Univ. of Santa Catarina (Brazil)

Published in SPIE Proceedings Vol. 6293:
Interferometry XIII: Applications
Erik L. Novak; Wolfgang Osten; Christophe Gorecki, Editor(s)

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