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Proceedings Paper

Wavefront fitting of interferogram with Zernike polynomials based on SVD
Author(s): Liping Chang; Zihua Wei; Weixing Shen; Zunqi Lin
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Paper Abstract

As the resolution of the interferometer is rapidly increasing, the higher requirement is proposed to the interferometry. For avoiding losing of the useful information of the actual interferogram, an algorithm is presented based on singular value decomposition (SVD) which is more stable than other algorithms to some extent. The weight coefficients of the orthogonal polynomials can be worked out directly, which can eliminate the computational error. Then an evaluation criterion is developed to choose the optimum Zernike polynomial number. The computer simulations of this algorithm are also made. The simulation experiments have proved that it is an efficient algorithm and can reconstruct the wavefront accurately and stably.

Paper Details

Date Published: 19 May 2006
PDF: 6 pages
Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61500G (19 May 2006); doi: 10.1117/12.677984
Show Author Affiliations
Liping Chang, Chinese Academy of Shanghai Institute of Optics and Fine Mechanics (China)
Zihua Wei, Chinese Academy of Shanghai Institute of Optics and Fine Mechanics (China)
Weixing Shen, Chinese Academy of Shanghai Institute of Optics and Fine Mechanics (China)
Zunqi Lin, Chinese Academy of Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 6150:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Xun Hou; Jiahu Yuan; James C. Wyant; Hexin Wang; Sen Han, Editor(s)

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