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Proceedings Paper

500-mm aperture wavelength-tuning phase-shifting interferometer
Author(s): Liqun Chai; Qiao Xu; Yan Deng; Guiping Cheng; Jiancheng Xu; Qikai Shi
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Paper Abstract

A 500-mm-aperture wavelength-tuning phase-shifting interferometer has been developed in FOERC applied to the measurement of large optics. The optical and mechanical design and the calibration technique of the phase shifter are described in detail. Test results show that Peak-to-Valley value smaller than 63nm of interference cavity is achieved.

Paper Details

Date Published: 19 May 2006
PDF: 6 pages
Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61500E (19 May 2006); doi: 10.1117/12.677976
Show Author Affiliations
Liqun Chai, Fine Optical Engineering Research Ctr. (China)
Qiao Xu, Fine Optical Engineering Research Ctr. (China)
Yan Deng, Fine Optical Engineering Research Ctr. (China)
Guiping Cheng, Fine Optical Engineering Research Ctr. (China)
Jiancheng Xu, Fine Optical Engineering Research Ctr. (China)
Qikai Shi, Fine Optical Engineering Research Ctr. (China)


Published in SPIE Proceedings Vol. 6150:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment

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