Share Email Print
cover

Proceedings Paper

Optical parameters analysis of a semi-conductive film based on genetic algorithm
Author(s): Yu Ning; Jiarong Ji; Zongfu Jiang; Weimin Ye; Chen Zhao
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

For a semi-conductive thin film and substrate system, it is difficult to obtain the geometric thickness and optical constants directly from reflectance value, if the materials of interest have finite thickness, absorption and dispersion. To simplify this, the model of Forouhi-Bloomer (F-B) is adopted to express reflectance merely with wavelength and several parameters which have definite values. Then the genetic algorithm (GA) is introduced to optimize and fit these parameters on data of reflection index in detected wave ranges. By comparing with a traditional optimization method the fitting error of GA is smaller. Finally, a sample with a thin film of amorphous Si coated on a crystal Si is analyzed. Thus, a novel method is presented to characterize the optical property of the film coated on a semi-conductive substrate, merely basing on the reflection index data.

Paper Details

Date Published: 19 May 2006
PDF: 7 pages
Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 615004 (19 May 2006); doi: 10.1117/12.677959
Show Author Affiliations
Yu Ning, National Univ. of Defense Technology (China)
Jiarong Ji, National Univ. of Defense Technology (China)
Zongfu Jiang, National Univ. of Defense Technology (China)
Weimin Ye, National Univ. of Defense Technology (China)
Chen Zhao, National Univ. of Defense Technology (China)


Published in SPIE Proceedings Vol. 6150:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Xun Hou; Jiahu Yuan; James C. Wyant; Hexin Wang; Sen Han, Editor(s)

© SPIE. Terms of Use
Back to Top