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Proceedings Paper

Laser interferometric transducers of linear displacements for inspection and control systems
Author(s): Vladimir M. Vedernikov
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Paper Abstract

Design principles of homodyne laser interferometric linear displacement transducers (LIDT) realizing within their interface modules an original digital data processing algorithm are considered. The use of designed LIDT as a feedback transmitter in X-Y table control system of laser photoplotter CLWS-300 is given as an example. The system provides table positioning accuracy of ± 5 nm. Maximum velocity of the table is 1 m/s. Laser displacement measurer with small-size digital indicator unit is described. The results of inspection and calibration of measuring systems of unique processing center of Italian company "Berardy" are presented.

Paper Details

Date Published: 9 June 2006
PDF: 8 pages
Proc. SPIE 6251, Lasers for Measurements and Information Transfer 2005, 625102 (9 June 2006); doi: 10.1117/12.677582
Show Author Affiliations
Vladimir M. Vedernikov, Technological Design Institute of Scientific Instrument Engineering (Russia)

Published in SPIE Proceedings Vol. 6251:
Lasers for Measurements and Information Transfer 2005
Vadim E. Privalov, Editor(s)

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