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Proceedings Paper

The pump intensity effect on the efficiency of discharge-pumped ArF excimer laser on a mixture of He:Ar:F2
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Paper Abstract

The results of experimental study of the pump intensity and active media parameters effect on output energy and efficiency of a discharge-pumped ArF (193 nm) excimer laser on a mixture of He:Ar:F2 are presented. It was experimentally shown that for the achievement of maximal output energy with maximal efficiency of an ArF excimer laser it is necessary to use an optimal pump intensity of 4.5-5.0 MW/cm3. To achieve such active media pump intensity the excitation scheme of the LC-inverter type has been used where the energy losses inside discharge circuit had been decreased. Using the pump intensity of 5.0 MW/cm3 in an active media of He:Ar:F2 - 79.7:20:0.3 at total pressure of 2.4 atm the output energy of 1.3 J at the total efficiency of 2.0% was obtained for the first time.

Paper Details

Date Published: 31 May 2006
PDF: 6 pages
Proc. SPIE 6263, Atomic and Molecular Pulsed Lasers VI, 626306 (31 May 2006); doi: 10.1117/12.677390
Show Author Affiliations
Alexander M. Razhev, Institute of Laser Physics (Russia)
Andrey A. Zhupikov, Institute of Laser Physics (Russia)


Published in SPIE Proceedings Vol. 6263:
Atomic and Molecular Pulsed Lasers VI
Victor F. Tarasenko; Georgy Mayer; Gueorgii G. Petrash, Editor(s)

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