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Proceedings Paper

Development of user-friendly software for the roughness measurement of ultra smooth surface
Author(s): Huiyu Li; Yuhe Li; Qingxiang Li; Xiaohua Liao; Jinglin Zheng
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Paper Abstract

This paper describes the development of software used for the ultra smooth surface roughness measurement system, whose precision reaches nanometer level. The software mainly consists of two independent modules: the image acquisition and the roughness analysis modules. The first module controls the rotation of the phase-shifter and gathers images from the CCD camera. The process is repeated several times according to the means of calculating phase. The second module is used to analyze the sample's roughness. Firstly the images are loaded, and then the phase image is calculated and processed in the light of the unwrapping algorithm. Finally the roughness data are acquired by integrating the unwrapped phase image. The roughness carves on both x and y direction can be readily displayed and the roughness parameters are calculated and simultaneously shown. Then the three dimensional profile is displayed by employing the functions of OpenGL, and the parameter of the three dimensional roughness is also shown. All these results can be readily saved. The software is developed with VC++ 6.0, and has several characterizations as follows: it runs independently without any aid of other software; to depress the influence of noises, ten images are gathered at one time and averaged automatically; through loading image the software can discriminate that whether four-bucket or five-bucket method should be adopted, and choose the corresponding algorithm in the following calculations; the sample's three dimensional profile is also shown directly.

Paper Details

Date Published: 19 May 2006
PDF: 6 pages
Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61502I (19 May 2006); doi: 10.1117/12.676898
Show Author Affiliations
Huiyu Li, Tsinghua Univ. (China)
Yuhe Li, Tsinghua Univ. (China)
Qingxiang Li, Tsinghua Univ. (China)
Xiaohua Liao, Tsinghua Univ. (China)
Jinglin Zheng, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 6150:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Xun Hou; Jiahu Yuan; James C. Wyant; Hexin Wang; Sen Han, Editor(s)

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