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Proceedings Paper

Measurement of parallelism and perpendicularity of large-size workpieces by laser alignment method
Author(s): Yong Song; Qun Hao; Dacheng Li
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Paper Abstract

A system designed for measuring large-size parallelism and perpendicularity of large-size workpieces by laser alignment was developed. This paper mainly focuses on three questions. First, the building of long distance alignment optical beam based on laser diode, single mode optical fiber and phase plate diffraction technique. Second, the building of datum planes that parallel or perpendicular to each other by using pentagonal prism. Third, a new image processing algorithm called orthogonal projection method. The algorithm converts two-dimension image into two one-dimension images, which can speed up the data processing and restrain noise. The performance of this system was tested and verified in National CIMS Engineering Technology Research Center in China. The experimental results show that the relative measurement accuracy of the alignment system attains micron (μm) (0.3×10-6L) in 10 meters measurement range.

Paper Details

Date Published: 19 May 2006
PDF: 5 pages
Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61502H (19 May 2006); doi: 10.1117/12.676895
Show Author Affiliations
Yong Song, Beijing Institute of Technology (China)
Qun Hao, Beijing Institute of Technology (China)
Dacheng Li, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 6150:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Xun Hou; Jiahu Yuan; James C. Wyant; Hexin Wang; Sen Han, Editor(s)

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