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Proceedings Paper

Improved homodyne laser interferometer used in micro-vibration analysis
Author(s): T. Guo; J. P. Chen; D. Dontsov; X. Fu; X. T. Hu; G. Jäger
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Paper Abstract

The use of homodyne interferometers has been limited to vibration measurements at objects with high surface reflectivity. This paper presents the modification of a homodyne Michelson laser interferometer that has been designed for vibration analysis at objects with industrial rough surfaces. High linearity, wide measurement range and low measurement uncertainty are the main features of this system. Experiments on an atomic force microscope (AFM) demonstrate the capability of the system.

Paper Details

Date Published: 19 May 2006
PDF: 6 pages
Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61502A (19 May 2006); doi: 10.1117/12.676885
Show Author Affiliations
T. Guo, Tianjin Univ. (China)
J. P. Chen, Tianjin Univ. (China)
D. Dontsov, SIOS Messtechnik GmbH (Germany)
X. Fu, Tianjin Univ. (China)
X. T. Hu, Tianjin Univ. (China)
G. Jäger, Ilmenau Technical Univ. (Germany)


Published in SPIE Proceedings Vol. 6150:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Xun Hou; Jiahu Yuan; James C. Wyant; Hexin Wang; Sen Han, Editor(s)

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