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Proceedings Paper

Analysis for the characteristic of a four-quadrant photo-detector applied to a novel laser aligning system
Author(s): Xiuqing Wang; De Xu; Min Tan; Yun Liu
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Paper Abstract

A novel alignment method is provided for the mask-plate alignment with two four-quadrant photodetectors. The location of lasers and four-quadrant photo-detectors are fixed. The mask-plate, which is carried by a manipulator with an adjustable platform, is between the lasers and the four-quadrant photo-detectors. Through two transparent reticle alignment marks, the laser beam is projected onto the active area of the four-quadrant photo-detectors. According to the output signals of the four-quadrant photo-detectors, the errors of the mask's position and pose are calculated out. So the mask-plate's position and pose are adjusted to implement alignment by the mask-plate-transferring manipulator with the adjustable platform. The alignment algorithm and the ε-Δ characteristic curve were deduced.

Paper Details

Date Published: 23 February 2006
PDF: 6 pages
Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61504V (23 February 2006); doi: 10.1117/12.676740
Show Author Affiliations
Xiuqing Wang, Institute of Automation (China)
He Bei Normal Univ. (China)
De Xu, Institute of Automation (China)
Min Tan, Institute of Automation (China)
Yun Liu, Institute of Automation (China)


Published in SPIE Proceedings Vol. 6150:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Xun Hou; Jiahu Yuan; James C. Wyant; Hexin Wang; Sen Han, Editor(s)

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