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Proceedings Paper

Application of cellular neural networks in the measurement of line-width and line edge roughness
Author(s): Hong-bo Li; Xue-zheng Zhao; Wei Chu; Ning Li
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Paper Abstract

The line-edges of the sample scanned by AFM is detected using cellular neural networks. Line-width, Line-width roughness and line edge roughness of line-structure are calculated respectively based on the analysis of the detected edge character. Since cellular neural network is characterized by high-speed parallel computation and easy to be implemented in hardware, it has more potential, comparing with other software technique, in the quick line-structure-parameters detection.

Paper Details

Date Published: 23 February 2006
PDF: 6 pages
Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61504S (23 February 2006); doi: 10.1117/12.676727
Show Author Affiliations
Hong-bo Li, Harbin Institute of Technology (China)
Xue-zheng Zhao, Harbin Institute of Technology (China)
Wei Chu, Harbin Institute of Technology (China)
Ning Li, Harbin Institute of Technology (China)


Published in SPIE Proceedings Vol. 6150:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Xun Hou; Jiahu Yuan; James C. Wyant; Hexin Wang; Sen Han, Editor(s)

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