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Proceedings Paper

Straightness error measurement of horizontal slideway
Author(s): Xuhua Wu; Lei Chen; Jiaofen Sun
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Paper Abstract

In this paper, a novel method named the virtual grating phase-shifting moire fringe method for static interferogram analysis is introduced in the straightness error measurement with optical interferometry. An optical flat as the test mirror is moved along the horizontal slideway with high accuracy in the experiment implemented on ZYGO. Based on the principle of small angle test, we measure the straightness error of the subsection guide in turn from the one end. Because of the slideway's straightness error, the optical flat couldn't keep moving along the optical axis. The variation of fringes tilt and fringes number can be seen from a series of static interferograms. Then each wavefront is retrieved by processing these interferograms with the virtual grating phase-shifting moire fringe method. With the theory of plane fitting algorithm, the angle between interference wavefront and optical axes is calculated from the angle between fitted plane and optical axes, then the guide track's departure from horizontal axes is obtained. The experiment results are presented at last.

Paper Details

Date Published: 23 February 2006
PDF: 5 pages
Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61504Q (23 February 2006); doi: 10.1117/12.676720
Show Author Affiliations
Xuhua Wu, Nanjing Univ. of Science and Technology (China)
Lei Chen, Nanjing Univ. of Science and Technology (China)
Jiaofen Sun, Nanjing Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 6150:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Xun Hou; Jiahu Yuan; James C. Wyant; Hexin Wang; Sen Han, Editor(s)

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