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Proceedings Paper

Adaptive vibration-resistant techniques in interferometry based on single-point phase-detecting
Author(s): Yong He; Lei Chen; Xiaofan Zhang
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Paper Abstract

Active vibration-resistant techniques for interferometer are gradually applied to eliminate the effects of environmental disturbance, the mechanic-electronic feedback method is one of the low-cost easy way to fulfill these techniques. The detection of vibration signal is the key part of this method, in this case, a single photodiode is used to detect optical phase of the interference field in order to obtain the vibration signal. Optoelectronic signals concerning with vibration are digitalized and analyzed by DSP, and then a feedback voltage is produced to PZT phase shifter which can compensate the change of optical path difference due to vibration. The principles of each part of this vibration-resistant system are described in detail including the design of electronic processing. Experimental results indicates that this method is an effective way to control the vibration with amplitude-frequency product less than 100 wave*Hz.

Paper Details

Date Published: 23 February 2006
PDF: 5 pages
Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61504E (23 February 2006); doi: 10.1117/12.676539
Show Author Affiliations
Yong He, Nanjing Univ. of Science and Technology (China)
Lei Chen, Nanjing Univ. of Science and Technology (China)
Xiaofan Zhang, Nanjing Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 6150:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Xun Hou; Jiahu Yuan; James C. Wyant; Hexin Wang; Sen Han, Editor(s)

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