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Proceedings Paper

A microoptical scanner
Author(s): Ying Huang; Sihai Chen; Sihua Xiang; Xinjian Yi
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Paper Abstract

Rotational prisms or reflectors are used for conventional optical scanners. Their disadvantages are large size, low scanning speed and high power consumption. In the paper a microoptical scanner based on the integration of piezoelectrical driver and microlens arrays is described. The microlens arrays consist of a convex microlens array and a cocave microlens array with 256×256 elements respectively. Each element dimension is 50×50 μm2. The scanner is driven by a piezoelectrical(PZT) crystal. A PA90 amplifier is controlled by an input signal produced by a single chip computer. The amplifier supplies a high voltage pulse signal to driving the PZT. The scanning frequency can reach 200Hz to 300Hz and the scanner's size is a few cubic centimeters.

Paper Details

Date Published: 23 February 2006
PDF: 5 pages
Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 615047 (23 February 2006); doi: 10.1117/12.676532
Show Author Affiliations
Ying Huang, Huazhong Univ. of Science and Technology (China)
Sihai Chen, Huazhong Univ. of Science and Technology (China)
Sihua Xiang, Huazhong Univ. of Science and Technology (China)
Xinjian Yi, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 6150:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment

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