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Proceedings Paper

Microscopic scattering imaging system of defects on ultra-smooth surface suitable for digital image processing
Author(s): Dandan Sun; Yongying Yang; Fengquan Wang; Liming Yang; Ruijie Li
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Paper Abstract

In this paper the defects' harm is pointed out and previously used inspection techniques are reviewed 1, 3, 5, and then a new measurement of defects--microscopic scattering imaging system suitable for digital image processing is put forward, which can detect defects in random distribution and random shape on the surface of optical component with large aperture. The imaging system is a 0.7×~4.5×zoom microscope. Multi-beam fiber optic illuminators are evenly distributed in annularity, and illuminate the detected surface with a special angle α; in the image are bright defects in black background, what is suitable for digital image processing; match defects to a set of standard defects and assess the dimensions of defects accurately. In the new system, the lateral resolution is approximately 1μm or even smaller, and the image and experimental results are very good. The experiment result has been proved by Scanning Electron Microscope (SEM).

Paper Details

Date Published: 19 May 2006
PDF: 6 pages
Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 615012 (19 May 2006); doi: 10.1117/12.676496
Show Author Affiliations
Dandan Sun, Zhejiang Univ. (China)
Yongying Yang, Zhejiang Univ. (China)
Fengquan Wang, Zhejiang Univ. (China)
Liming Yang, Fine Optical Engineering Research Ctr. (China)
Ruijie Li, Fine Optical Engineering Research Ctr. (China)


Published in SPIE Proceedings Vol. 6150:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Xun Hou; Jiahu Yuan; James C. Wyant; Hexin Wang; Sen Han, Editor(s)

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