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Proceedings Paper

Application of power spectral density to specify optical super-smooth surfaces
Author(s): Yaohong Liu; Lin Teng; Daqi Li; Xiao Zhang
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Paper Abstract

The power spectral density (PSD) is an appropriate way to specify the optical super-smooth surfaces. The reasons to characterize the super-smooth surfaces using the PSD are discussed. Some super-smooth mirror substrates obtained by different process methods are measured with an atomic force microscope (AFM). The measured optical surfaces are characterized by the PSD. The result shows that the PSD is of great guidance to the selection of manufacturing methods and process improvement.

Paper Details

Date Published: 23 February 2006
PDF: 5 pages
Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61503I (23 February 2006); doi: 10.1117/12.676477
Show Author Affiliations
Yaohong Liu, Flight Automatic Control Research Institute (China)
Lin Teng, Flight Automatic Control Research Institute (China)
Daqi Li, Flight Automatic Control Research Institute (China)
Xiao Zhang, Flight Automatic Control Research Institute (China)


Published in SPIE Proceedings Vol. 6150:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Xun Hou; Jiahu Yuan; James C. Wyant; Hexin Wang; Sen Han, Editor(s)

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