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Proceedings Paper

Design of a coherent optical interferometric system
Author(s): Jiancheng Xu; Guiping Sheng; Liqun Chai; Qiao Xu; Yan Deng
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Paper Abstract

A 100-mm-aperture high lateral resolution interferometer has been developed in Fine Optical Engineering Research Center (FOERC), which is applied to the measurement of spatial frequencies of up to 2.5 lines/mm over a 100mm field of view. The system transfer function of the interferometer is greater than 60% at near half the Nyquist frequency. To demonstrate the performance of this high lateral resolution interferometer, theoretical errors of the system are thoroughly analyzed and the design implementation is carefully studied, such as light source, wave front slope, tolerance analysis, CCD sample and so on.

Paper Details

Date Published: 19 May 2006
PDF: 6 pages
Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61501B (19 May 2006); doi: 10.1117/12.676409
Show Author Affiliations
Jiancheng Xu, Fine Optical Engineering Research Ctr. (China)
Guiping Sheng, Fine Optical Engineering Research Ctr. (China)
Liqun Chai, Fine Optical Engineering Research Ctr. (China)
Qiao Xu, Fine Optical Engineering Research Ctr. (China)
Yan Deng, Fine Optical Engineering Research Ctr. (China)


Published in SPIE Proceedings Vol. 6150:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Xun Hou; Jiahu Yuan; James C. Wyant; Hexin Wang; Sen Han, Editor(s)

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