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Proceedings Paper

Research on parameter of grating digital subdivision
Author(s): Xiangqun Cao; Jin Xu; Tianjin Tang; Zukang Lu
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Paper Abstract

The grating digital subdivision system in this paper is made up of light resource, metrological grating, object lens of microscope, electronic-eyepiece based on CMOS image sensor, and personal computer. In this paper, we introduce the experiment system that use different object lens and electronic eyepiece, for example, object lens with different NA, electronic eyepiece with different CMOS image sensors and different resolution. We write a digital subdivide software for the system, in experiment, we use only one subdivide software and image collection software. In the paper, we analyze the experiment with theory and practice, which use the same software but different hardware. We used the different object lens with 5X, 10X, 20X, 40X, and used the different CMOS image sensor resolution with 320×240,640×480,1280×1024,1600×1200. After these experiment, we do analysis the data, all these practice will take a reference to everyone who research on grating digital subdivision.

Paper Details

Date Published: 19 May 2006
PDF: 5 pages
Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 615019 (19 May 2006); doi: 10.1117/12.676407
Show Author Affiliations
Xiangqun Cao, Zhejiang Univ. (China)
Jin Xu, Zhejiang Univ. (China)
Tianjin Tang, Zhejiang Univ. (China)
Zukang Lu, Zhejiang Univ. (China)


Published in SPIE Proceedings Vol. 6150:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
Xun Hou; Jiahu Yuan; James C. Wyant; Hexin Wang; Sen Han, Editor(s)

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