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Proceedings Paper

A curvature sensor using white-light scanning interferometry
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Paper Abstract

We present a method of free-form surface profile measurement using white-light scanning interferometry. This method is based on the principle of curvature sensor which measures the local curvature under test along a line. The profile is then reconstructed from the curvature data on the each point. Unlike subaperture-stiching method and slope detection method curvature sensing have strong points from a geometric point of view in measuring the free-form surface profile. Curvature is related to second derivative terms of surface profile and an intrinsic property of the test piece, which is independent of its position and tip-tilt motion. The curvature is measured at every local area with high accuracy and high lateral resolution by using White-light scanning interferometry.

Paper Details

Date Published: 14 August 2006
PDF: 8 pages
Proc. SPIE 6292, Interferometry XIII: Techniques and Analysis, 629219 (14 August 2006); doi: 10.1117/12.675925
Show Author Affiliations
ByoungChang Kim, Kyungnam Univ. (South Korea)
SeHeon Kim, Kyungnam Univ. (South Korea)
YongKwan Kwon, Kyungnam Univ. (South Korea)
YunWoo Lee, Korea Research Institute of Standards and Science (South Korea)
HoSoon Yang, Korea Research Institute of Standards and Science (South Korea)
HyugGyo Rhee, Korea Research Institute of Standards and Science (South Korea)


Published in SPIE Proceedings Vol. 6292:
Interferometry XIII: Techniques and Analysis
Katherine Creath; Joanna Schmit, Editor(s)

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