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Proceedings Paper

Measurement of surface details with nanometer resolution using several optically held probes
Author(s): Petr Jákl; Mojmír Šerý; Miroslav Liška; Pavel Zemánek
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Paper Abstract

Scanning probe microscopy with multiple optically held probes is presented. Acousto-optical deflectors are employed to rapidly switch the optical trap between two positions so that the trapped probes are not allowed to leave the trap region. The probes are fluorescently labelled and their vertical position is acquired from the level of two-photon fluorescence. This particle position detection technique is very sensitive and allows obtaining surface details with resolution better than 10 nm. Using two probes simultaneously accelerates the measurement process and allows scanning of larger regions.

Paper Details

Date Published: 18 April 2006
PDF: 6 pages
Proc. SPIE 6180, Photonics, Devices, and Systems III, 61802A (18 April 2006); doi: 10.1117/12.675862
Show Author Affiliations
Petr Jákl, Institute of Scientific Instruments (Czech Republic)
Mojmír Šerý, Institute of Scientific Instruments (Czech Republic)
Miroslav Liška, Brno Univ. of Technology (Czech Republic)
Pavel Zemánek, Institute of Scientific Instruments (Czech Republic)

Published in SPIE Proceedings Vol. 6180:
Photonics, Devices, and Systems III
Pavel Tománek; Miroslav Hrabovský; Miroslav Miler; Dagmar Senderákova, Editor(s)

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