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Proceedings Paper

Improved picosecond laser ablation with second harmonic seeding
Author(s): S. Zoppel; J. Zehetner; G. A. Reider
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Paper Abstract

We report on recent results of laser ablation in semiconductors obtained by simultaneous irradiation of the sample with a superposition of the fundamental beam of a picosecond-Neodymium-Vanadate (Nd:VAN) laser (1064 nm, 10 ps pulse duration) and a small fraction of its second harmonic (SH) produced in a thin nonlinear crystal. In this fashion, the ablation yield could be increased by 70%. In addition, the ablation quality was improved in terms of surface smoothness. The underlying mechanism can be attributed to a 'seeding' of the target area with free carriers by the 532 nm radiation.

Paper Details

Date Published: 18 April 2006
PDF: 6 pages
Proc. SPIE 6180, Photonics, Devices, and Systems III, 61801S (18 April 2006); doi: 10.1117/12.675831
Show Author Affiliations
S. Zoppel, Vienna Univ. of Technology (Austria)
Vorarlberg Univ. of Applied Sciences (Austria)
J. Zehetner, Vorarlberg Univ. of Applied Sciences (Austria)
G. A. Reider, Vienna Univ. of Technology (Austria)

Published in SPIE Proceedings Vol. 6180:
Photonics, Devices, and Systems III
Pavel Tománek; Miroslav Hrabovský; Miroslav Miler; Dagmar Senderákova, Editor(s)

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