Share Email Print
cover

Proceedings Paper

Total internal reflection ellipsometry of periodic structures
Author(s): Jaromír Pištora; Jaroslav Vlček; Petr Hlubina; Martin Foldyna; Ondřej Životský
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The theoretical model of the evanescent waves coupling with dielectric and metallic strip gratings is described. The interaction of electromagnetic field with lamellar periodic structures and their diffraction properties are determined by coupled wave method implemented as the Fourier modal method. The simulations of the ellipsometric response under internal reflection for different geometrical and material configurations are presented. The attention is concentrated on the study of coupling strength influence, effects connected with stripes geometry, and, with absorption in metallic elements of grating.

Paper Details

Date Published: 18 April 2006
PDF: 5 pages
Proc. SPIE 6180, Photonics, Devices, and Systems III, 61801E (18 April 2006); doi: 10.1117/12.675733
Show Author Affiliations
Jaromír Pištora, Technical Univ. (Czech Republic)
Jaroslav Vlček, Technical Univ. (Czech Republic)
Petr Hlubina, Technical Univ. (Czech Republic)
Martin Foldyna, Technical Univ. (Czech Republic)
Ondřej Životský, Technical Univ. (Czech Republic)


Published in SPIE Proceedings Vol. 6180:
Photonics, Devices, and Systems III
Pavel Tománek; Miroslav Hrabovský; Miroslav Miler; Dagmar Senderákova, Editor(s)

© SPIE. Terms of Use
Back to Top