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Proceedings Paper

Study of thin TiCxN1-x films fabricated by hybrid magnetron-laser deposition
Author(s): Tomáš Kocourek; Miroslav Jelínek; Václav Studnička; Jaromír Kadlec
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Paper Abstract

Titanium- carbonitride thin films were grown at room temperature using a hybrid deposition arrangement combining DC magnetron sputtering and KrF pulsed laser deposition (MSPLD). Carbon and titanium were simultaneously deposited on the same Si substrate, dimensions of 3 cm × 3 cm. Films were fabricated in argon- nitrogen atmosphere of 1 Pa - 5 Pa, for laser fluence of 15 Jcm-2 and magnetron power of 150 W. Film properties were modified by RF discharge held between the target and substrate. Film crystallinity was studied by XRD and the composition depth profile of TiCN layers by glow discharge optical emission spectroscopy (GDOES).

Paper Details

Date Published: 18 April 2006
PDF: 5 pages
Proc. SPIE 6180, Photonics, Devices, and Systems III, 61800G (18 April 2006); doi: 10.1117/12.675656
Show Author Affiliations
Tomáš Kocourek, Institute of Physics (Czech Republic)
Miroslav Jelínek, Institute of Physics (Czech Republic)
Václav Studnička, Institute of Physics (Czech Republic)
Jaromír Kadlec, Univ. of Defense (Czech Republic)

Published in SPIE Proceedings Vol. 6180:
Photonics, Devices, and Systems III
Pavel Tománek; Miroslav Hrabovský; Miroslav Miler; Dagmar Senderákova, Editor(s)

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