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Proceedings Paper

Metal resistor bolometer on GaAs substrate
Author(s): P. Macháč; L. Ryć
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Paper Abstract

A metal resistor bolometer for the detection of x-ray emission from laser plasma has been designed and fabricated. The bolometer is placed on a thin polymeric foil with the use of thin film technology. The foil is suspended on a GaAs substrate. The Au/Pt/Ti thin film resistor of 2000 Ω resistance and 0.19 %/K temperature coefficient is used for sensing temperature. A detection head equipped with the bolometer and accompanying read-out electronics has been fabricated and used in a plasma experiment.

Paper Details

Date Published: 18 April 2006
PDF: 4 pages
Proc. SPIE 6180, Photonics, Devices, and Systems III, 618005 (18 April 2006); doi: 10.1117/12.675640
Show Author Affiliations
P. Macháč, Institute of Chemical Technology (Czech Republic)
L. Ryć, Institute of Plasma Physics and Laser Microfusion (Poland)

Published in SPIE Proceedings Vol. 6180:
Photonics, Devices, and Systems III
Pavel Tománek; Miroslav Hrabovský; Miroslav Miler; Dagmar Senderákova, Editor(s)

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