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Proceedings Paper

Femtosecond laser microfabrication of 3D photonic structures
Author(s): Kock Khuen Seet; Toshiaki Kondo; Vygantas Mizeikis; Vygandas Jarutis; Saulius Juodkazis; Hiroaki Misawa
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Paper Abstract

The physical principles underlying the three-dimensional (3D) laser microstructuring technique are outlined, its applications for the fabrication of 3D photonic crystals are described. Structures recorded by direct laser writing and holographic recording techniques in SU-8 photoresist are presented along with their structural and optical characterization.

Paper Details

Date Published: 26 April 2006
PDF: 12 pages
Proc. SPIE 6161, International Conference on Lasers, Applications, and Technologies 2005: Laser-Assisted Micro- and Nanotechnologies, 616103 (26 April 2006); doi: 10.1117/12.674990
Show Author Affiliations
Kock Khuen Seet, CREST, JST (Japan)
Hokkaido Univ. (Japan)
Toshiaki Kondo, CREST, JST (Japan)
Hokkaido Univ. (Japan)
Vygantas Mizeikis, CREST, JST (Japan)
Hokkaido Univ. (Japan)
Vygandas Jarutis, CREST, JST (Japan)
Hokkaido Univ. (Japan)
Saulius Juodkazis, CREST, JST (Japan)
Hokkaido Univ. (Japan)
Hiroaki Misawa, CREST, JST (Japan)
Hokkaido Univ. (Japan)


Published in SPIE Proceedings Vol. 6161:
International Conference on Lasers, Applications, and Technologies 2005: Laser-Assisted Micro- and Nanotechnologies
Vitaly I. Konov; Vladislav Ya. Panchenko; Koji Sugioka; Vadim P. Veiko, Editor(s)

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