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Proceedings Paper

Dynamics of particle ejection in dry laser cleaning
Author(s): David Grojo; Alain Cros; Philippe Delaporte; Marc Sentis
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Paper Abstract

Time- and space-resolved forward scattering detection was demonstrated as a suitable technique to characterize the dynamics of the ejected particles during dry laser cleaning. Silica particles with radii of 250 nanometers deposited on silicon substrates were irradiated by single nanosecond laser pulses with fluences above the particle removal threshold. The observation of different particle clouds propagating with different velocities was in support of the coexistence of at least two removal mechanisms. The ejection velocities were measured as a function of laser fluence in order to distinguish between the mechanisms involved in laser-assisted particle removal.

Paper Details

Date Published: 7 June 2006
PDF: 9 pages
Proc. SPIE 6261, High-Power Laser Ablation VI, 62610C (7 June 2006); doi: 10.1117/12.674578
Show Author Affiliations
David Grojo, LP3, CNRS, Univ. de la Mediterranée (France)
Alain Cros, LP3, CNRS, Univ. de la Mediterranée (France)
Philippe Delaporte, LP3, CNRS, Univ. de la Mediterranée (France)
Marc Sentis, LP3, CNRS, Univ. de la Mediterranée (France)


Published in SPIE Proceedings Vol. 6261:
High-Power Laser Ablation VI
Claude R. Phipps, Editor(s)

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