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Proceedings Paper

Analysis of micro lens fabrication via femtosecond laser
Author(s): Shizhou Xiao; Rui Guo; Wenhao Huang; Andong Xia
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Paper Abstract

Tightly focused femtosecond laser, which can induce two-photon absorption (TPA) in photosensitive resin, has been regarded as a unique kind of technology for three-dimensional micro and nano fabrication. This technology provides the ability to fabricate precise micro optical devices such as three-dimensional photonic crystal and micro lens. In this paper, the characteristic for micro lens fabrication, and demonstrate some numeric simulation result about the lens to make sure how the fabrication parameters, such as laser power, scanning step distance and scanning path method, effect on micro lens surface such as its profile and roughness is presented. With the guidance of the simulation conclusion, by optimizing those parameters, good experiment results are obtained.

Paper Details

Date Published: 9 June 2006
PDF: 6 pages
Proc. SPIE 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 61493H (9 June 2006); doi: 10.1117/12.674353
Show Author Affiliations
Shizhou Xiao, Univ. of Science and Technology of China (China)
Rui Guo, Univ. of Science and Technology of China (China)
Wenhao Huang, Univ. of Science and Technology of China (China)
Andong Xia, Institute of Chemistry (China)


Published in SPIE Proceedings Vol. 6149:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies

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