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Proceedings Paper

Precise processing of transparent material with femtosecond laser pulses
Author(s): Lin Ma; Shunxiang Shi; Guanghua Cheng; Wei Zhao; Guofu Chen
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Paper Abstract

Based on the physical mechanisms of femtosecond laser-transparent materials interactions, three kinds of micromachining including three dimensional data storage, optical waveguide network and grating with an amplified Ti:sapphire laser system are presented. These optical devices on different transparent materials by femtosecond pulses are featured. The effect of laser machined parameters such as irradiated energy, the scanning speed and the recording material upon fabricated optical devices is studied in detail. From examples, the versatility of femtosecond laser precise micromachining technique is demonstrated. Practical application of femtosecond laser materials processing is illuminated.

Paper Details

Date Published: 9 June 2006
PDF: 6 pages
Proc. SPIE 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 614935 (9 June 2006); doi: 10.1117/12.674323
Show Author Affiliations
Lin Ma, Xidian Univ. (China)
Shunxiang Shi, Xidian Univ. (China)
Guanghua Cheng, Xi'an Institute of Optics and Precision Mechanics (China)
Wei Zhao, Xi'an Institute of Optics and Precision Mechanics (China)
Guofu Chen, Xi'an Institute of Optics and Precision Mechanics (China)


Published in SPIE Proceedings Vol. 6149:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; Shangming Wen; Yaolong Chen; Ernst-Bernhard Kley, Editor(s)

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