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Proceedings Paper

Preparation of silicon coating on SiC mirror by EB-PVD
Author(s): Yumin Zhang; Yufeng Zhou; Jiecai Han; Jianhan Zhang; Wang Yao; Yuanyuan Han
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Paper Abstract

Some investigations into preparation of silicon coating on SiC mirror by Electronic Beam Physical Vapor Deposition (EB-PVD) are introduced in the paper, which include adhesion strength of coating to substrate, pattern of coating, and residual stress etc. According to the investigations, it was found that only when the temperature of substrate in the optimization temperature range, the excellent thermal-shock resistance and adhesion strength of coating to substrate are obtained. Furthermore, the coating has the column crystal structure. surface finish, deposition rate and gravity direction may have important influences on properties of coating-substrate system.

Paper Details

Date Published: 9 June 2006
PDF: 5 pages
Proc. SPIE 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 61492C (9 June 2006); doi: 10.1117/12.674280
Show Author Affiliations
Yumin Zhang, Harbin Institute of Technology (China)
Yufeng Zhou, Harbin Institute of Technology (China)
Jiecai Han, Harbin Institute of Technology (China)
Jianhan Zhang, Harbin Institute of Technology (China)
Wang Yao, Harbin Institute of Technology (China)
Yuanyuan Han, Harbin Institute of Technology (China)


Published in SPIE Proceedings Vol. 6149:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies

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