Share Email Print
cover

Proceedings Paper

Research of an integrated LiTaO3 pyroelectric infrared fire detector
Author(s): Zheng Dong; Da-Gui Huang; De-Yin Zhang
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

A new integrated LiTaO3 pyroelectric infrared fire detector and its characteristics are investigated in this paper. A novel multilayer infrared detector structure and its operating principle are presented. The detector is fabricated based on the pyroelectric effect of LiTaO3 film by the technology of MEMS based on silicon technology. A detector response parameter measurement system is built to measure the infrared response of the fire detector. The voltage response and the specific detectivity of the detector are also studied.

Paper Details

Date Published: 9 June 2006
PDF: 6 pages
Proc. SPIE 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 61491X (9 June 2006); doi: 10.1117/12.674259
Show Author Affiliations
Zheng Dong, Univ. of Electronic Science and Technology of China (China)
Da-Gui Huang, Univ. of Electronic Science and Technology of China (China)
De-Yin Zhang, Univ. of Electronic Science and Technology of China (China)


Published in SPIE Proceedings Vol. 6149:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; Shangming Wen; Yaolong Chen; Ernst-Bernhard Kley, Editor(s)

© SPIE. Terms of Use
Back to Top