Share Email Print
cover

Proceedings Paper

Factors affecting the surface shape and removal rate of workpiece in CMP
Author(s): Quantang Fan; Jianqiang Zhu; Baoan Zhang; Weixing Shen
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The factors affecting the removal rate and surface shape in CMP is introduced. The edge effect is a critical problem in CMP process, which behaves on the global planarization of workpiece-pad interface and change on local planarization and results in collapse or rise in workpiece edges. One of the main factors of edge effect is Von Mises stress, which is a composition stress. The main affecting factor of Von Mises is the axial stress component. The factors affecting the material removal rate (MRR) of workpiece surface and surface nonuniformity include shape, material properties and thickness of pad and polishing media. Factors of load and relative velocity in CMP are also discussed.

Paper Details

Date Published: 9 June 2006
PDF: 6 pages
Proc. SPIE 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 61491Q (9 June 2006); doi: 10.1117/12.674252
Show Author Affiliations
Quantang Fan, Shanghai Institute of Optics and Fine Mechanics (China)
Jianqiang Zhu, Shanghai Institute of Optics and Fine Mechanics (China)
Baoan Zhang, Shanghai Institute of Optics and Fine Mechanics (China)
Weixing Shen, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 6149:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; Shangming Wen; Yaolong Chen; Ernst-Bernhard Kley, Editor(s)

© SPIE. Terms of Use
Back to Top