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Proceedings Paper

ZnS thin films fabricated by electron beam evaporation with glancing angle deposition
Author(s): Sumei Wang; Guodong Xia; Jianda Shao; Zhengxiu Fan
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Paper Abstract

GLAD ZnS films prepared by electron beam evaporation method with glancing angle deposition technique are reported. The influence of different oblique angle on the structure and optical properties is investigated using atomic force microscopy and transmittance spectra. The GLAD ZnS films exhibit a porous structure with isolated island and columnar formed. The surface roughness increases with the increase of oblique angle. The refractive indexes of GLAD ZnS films are lower than that of corresponding bulk materials. The maximal birefringence is obtained at oblique angle α=80o, which is ascribed to the orientated growth and anistropic structure of GLAD films. Therefore, the glancing angle deposition technique is a promising technique to obtain enhanced birefringence property.

Paper Details

Date Published: 9 June 2006
PDF: 5 pages
Proc. SPIE 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 61491L (9 June 2006); doi: 10.1117/12.674246
Show Author Affiliations
Sumei Wang, Shanghai Institute of Optics and Fine Mechanics (China)
Graduate School of the Chinese Academy of Sciences (China)
Guodong Xia, Shanghai Institute of Optics and Fine Mechanics (China)
Graduate School of the Chinese Academy of Sciences (China)
Jianda Shao, Shanghai Institute of Optics and Fine Mechanics (China)
Zhengxiu Fan, Graduate School of the Chinese Academy of Sciences (China)


Published in SPIE Proceedings Vol. 6149:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; Shangming Wen; Yaolong Chen; Ernst-Bernhard Kley, Editor(s)

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