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Proceedings Paper

Structure and properties of diamond-like carbon coatings on large area infrared elements
Author(s): Qiantao Li; Changxin Xiong; Mi Zhu
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Paper Abstract

In this paper, high quality DLC coatings on large area (φ=150 ~ 250mm) infrared elements have been prepared by radio frequency enhanced plasma chemical vapor deposition (RF-PECVD) method. The microstructure has been studied by using Raman spectroscopy and FTIR spectroscopy. These DLC coatings show good uniformity, high infrared transmittance and resistance to harsh environment. The relations between RF power density, the microstructure and properties have been discussed

Paper Details

Date Published: 9 June 2006
PDF: 6 pages
Proc. SPIE 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 61491J (9 June 2006); doi: 10.1117/12.674243
Show Author Affiliations
Qiantao Li, Huazhong Institute of Electro-Optics (China)
Changxin Xiong, Huazhong Institute of Electro-Optics (China)
Mi Zhu, Huazhong Institute of Electro-Optics (China)


Published in SPIE Proceedings Vol. 6149:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; Shangming Wen; Yaolong Chen; Ernst-Bernhard Kley, Editor(s)

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