Share Email Print
cover

Proceedings Paper

Refractive index analysis of graded index coatings prepared by reactive magnetron sputtering
Author(s): Zicai Shen; Shijie Liu; Wiejin Kong; Jian Shen; Jianda Shao; Zhengxiu Fan
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Reactive magnetron sputtering can be used to prepare graded index coatings. In this paper the relationship between the refractive index of the coatings and the partial pressure of reactive gas is discussed by experiment, in which A, O2 and Si are taken as sputtering gas, reactive gas and target material separately. And we have come to such conclusions that with the increase of partial pressure of reactive gas the color of the coatings turns shoal, the transmittance minimum of the coatings increases and the refractive index of coatings decreases according to the fitting rule of cubic polynomial. From XRD analysis, it can be seen that the coatings are identified to be amorphous.

Paper Details

Date Published: 9 June 2006
PDF: 5 pages
Proc. SPIE 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 61491G (9 June 2006); doi: 10.1117/12.674240
Show Author Affiliations
Zicai Shen, Shanghai Institute of Optics and Fine Mechanics (China)
Graduate School of the Chinese Academy of Sciences (China)
Shijie Liu, Shanghai Institute of Optics and Fine Mechanics (China)
Graduate School of the Chinese Academy of Sciences (China)
Wiejin Kong, Shanghai Institute of Optics and Fine Mechanics (China)
Graduate School of the Chinese Academy of Sciences (China)
Jian Shen, Shanghai Institute of Optics and Fine Mechanics (China)
Graduate School of the Chinese Academy of Sciences (China)
Jianda Shao, Shanghai Institute of Optics and Fine Mechanics (China)
Zhengxiu Fan, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 6149:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; Shangming Wen; Yaolong Chen; Ernst-Bernhard Kley, Editor(s)

© SPIE. Terms of Use
Back to Top