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Proceedings Paper

Preparation of the multi-layer LiTaO3 infrared-detected functional thin film
Author(s): De-Yin Zhang; Da-Gui Huang; Zheng Dong
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Paper Abstract

A new sensing unit structure of the uncooled infrared detector based on the multilayer lithium tantalite (LiTaO3) pyroelectric functional thin film is introduced in this paper. An innovative sol-gel process using lithium acetate and tantalum ethoxide as starting materials to prepare the multi-layer LiTaO3 functional thin film on two different substrates is described in detail. The glacial acetic acid addition in the tantalate ethoxide sol results in a new type molecularly modified precursor. And the LiTaO3 thin film was fabricated by spinning coater at 3000 r.p.m. To prevent the coatings from cracking, two-step "slow preannealing" was used to thermally treat the LiTaO3 thin film samples. The gold black infrared absorbing layer of the LiTaO3 thin film sample was evaporated about 300 nm in a clean evaporating chamber charged with nitrogen gas under a pressure of about150 Pa. The voltage response of the LiTaO3 thin film sample was obtained by the infrared device measurement system. The specific detectivity peak of the LiTaO3 thin film sample is near 6.1×108cmHz1/2W-1 from 1Hz to 100Hz.

Paper Details

Date Published: 9 June 2006
PDF: 5 pages
Proc. SPIE 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 614911 (9 June 2006); doi: 10.1117/12.674225
Show Author Affiliations
De-Yin Zhang, Univ. of Electronic Science and Technology of China (China)
Civil Aviation Flight Univ. of China (China)
Da-Gui Huang, Univ. of Electronic Science and Technology of China (China)
Zheng Dong, Univ. of Electronic Science and Technology of China (China)


Published in SPIE Proceedings Vol. 6149:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies

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