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Proceedings Paper

Profilometer with sub-nanometer resolution for on-line measurement of fine optical surfaces
Author(s): Zhao-fei Zhou; Wei Huang; Tao Zhang
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Paper Abstract

The profilometer for on-line and non-contact measurement of the fine optical surfaces is described in this paper, which works on the principle of the differential interferometry with coaxial interference arms. The optical part of that is isolated and easy to install on the machine tools or the measuring machineries ea. This profilometer has excellent resistance to disturbance, especially to mechanical vibration, when the amplitude of vibration is about 300nm. So it still can be used to measure the micro-profile with sub-nanometer resolution. The vertical resolution of the profilometer is better than 0.05 nm rms. and need not add any condition or pretreatment

Paper Details

Date Published: 9 June 2006
PDF: 5 pages
Proc. SPIE 6149, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 61490Z (9 June 2006); doi: 10.1117/12.674223
Show Author Affiliations
Zhao-fei Zhou, Sichuan Univ. (China)
Wei Huang, Sichuan Univ. (China)
Tao Zhang, Sichuan Univ. (China)


Published in SPIE Proceedings Vol. 6149:
2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
Li Yang; Shangming Wen; Yaolong Chen; Ernst-Bernhard Kley, Editor(s)

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