Share Email Print

Proceedings Paper

Experiment and modeling of tilted mirror MEMS variable optical attenuator
Author(s): Chun He
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We developed model and unveiled the mechanism of the large wavelength-dependent attenuation (WDA) that has been hindering the development of tilting-mirror MEMS VOA. We developed a new tilting-mirror VOA with low WDA of <0.1dB at 20dB attenuation.

Paper Details

Date Published: 3 March 2006
PDF: 4 pages
Proc. SPIE 6124, Optoelectronic Integrated Circuits VIII, 61240H (3 March 2006); doi: 10.1117/12.674117
Show Author Affiliations
Chun He, AFOP, Inc. (United States)

Published in SPIE Proceedings Vol. 6124:
Optoelectronic Integrated Circuits VIII
Louay A. Eldada; El-Hang Lee, Editor(s)

© SPIE. Terms of Use
Back to Top