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Proceedings Paper

Novel x-ray optics with Si wafers and formed glass
Author(s): R. Hudec; L. Pina; V. Semencova; A. Inneman; M. Skulinova; L. Sveda; M. Mika; V. Brozek; R. Kacerovsky; J. Prokop; J. Sik
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Paper Abstract

The thermally formed thin glass foils and optically shaped Si wafers are considered to belong to the most promising technologies for future large space X-ray telescopes. We present and discuss the recent progress in these technologies, as well as properties of test mirrors produced and tested. For both technologies, both flat and curved samples have been produced and tested. The achieved profile accuracy is of order of 1 micrometer or better, while the bending technologies maintain the intrinsic fine surface microroughness of substrates (better than 0.5 nm for glass and around 0.1 nm for Si wafers).

Paper Details

Date Published: 13 June 2006
PDF: 12 pages
Proc. SPIE 6266, Space Telescopes and Instrumentation II: Ultraviolet to Gamma Ray, 62661H (13 June 2006); doi: 10.1117/12.673306
Show Author Affiliations
R. Hudec, Astronomical Institute (Czech Republic)
L. Pina, Ctr. of Advanced X-ray Technologies (Czech Republic)
Czech Technical Univ. (Czech Republic)
V. Semencova, Ctr. of Advanced X-ray Technologies (Czech Republic)
Institute of Chemical Technology (Czech Republic)
A. Inneman, Ctr. of Advanced X-ray Technologies (Czech Republic)
M. Skulinova, Astronomical Institute (Czech Republic)
L. Sveda, Ctr. of Advanced X-ray Technologies (Czech Republic)
M. Mika, Institute of Chemical Technology (Czech Republic)
V. Brozek, Institute of Plasma Physics (Czech Republic)
R. Kacerovsky, Institute of Chemical Technology (Czech Republic)
J. Prokop, Institute of Chemical Technology (Czech Republic)
J. Sik, ON Semiconductor (Czech Republic)


Published in SPIE Proceedings Vol. 6266:
Space Telescopes and Instrumentation II: Ultraviolet to Gamma Ray
Martin J. L. Turner; Günther Hasinger, Editor(s)

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