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Proceedings Paper

Laser produced x-ray by high brightness and power diode pumped Nd:YAG laser for compact x-ray lithography and microscopy
Author(s): Harry Rieger
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Paper Abstract

High Brightness and Power Diode Pumped Nd:YAG Laser is the engine for Laser Produced X-ray (LPX). The LPX system consists of a compact diode pumped Nd:YAG laser system which produces brightness in excess of 1015 W/cm2 on target at up to 300 watts average power (4 parallel beams). The MOPA (Master Oscillator Power Amplifier) laser system delivers 250 mJ/pulse @ 300 Hz per beam (75 W average). 4 beams system at 300 W average power was demonstrated. The high brightness is achieved using ~800 ps pulse duration and near diffraction limited beam quality. Very high conversion efficiency (~9%) into 2π sr from 1064 nm laser output to 1 nm broadband x-ray was demonstrated using copper tape target. 1 nm x-rays were used for proximity x-ray lithography and demonstrated feature size resolution down to 75 nm. Narrow linewidth x-ray (λ/Δλ~600) has also been demonstrated with 1% conversion efficiency from 532 nm to 3.37 nm using Mylar tape target for compact high resolution and contrast x-ray tomography for biological cells. A unique mechanical shutter was developed to stop all the ablated debris from the target material that can damage and contaminate the fragile x-ray optics.

Paper Details

Date Published: 7 June 2006
PDF: 12 pages
Proc. SPIE 6261, High-Power Laser Ablation VI, 62610W (7 June 2006); doi: 10.1117/12.673015
Show Author Affiliations
Harry Rieger, JMAR Technologies, Inc. (United States)

Published in SPIE Proceedings Vol. 6261:
High-Power Laser Ablation VI
Claude R. Phipps, Editor(s)

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