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Proceedings Paper

Far infrared through millimeter backshort-under-grid arrays
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Paper Abstract

We are developing a large-format, versatile, bolometer array for a wide range of infrared through millimeter astronomical applications. The array design consists of three key components - superconducting transition edge sensor bolometer arrays, quarter-wave reflective backshort grids, and Superconducting Quantum Interference Device (SQUID) multiplexer readouts. The detector array is a filled, square grid of bolometers with superconducting sensors. The backshort arrays are fabricated separately and are positioned in the etch cavities behind the detector grid. The grids have unique three-dimensional interlocking features micromachined into the walls for positioning and mechanical stability. The ultimate goal of the program is to produce large-format arrays with background-limited sensitivity, suitable for a wide range of wavelengths and applications. Large-format (kilopixel) arrays will be directly indium bump bonded to a SQUID multiplexer circuit. We have produced and tested 8×8 arrays of 1 mm detectors to demonstrate proof of concept. 8×16 arrays of 2 mm detectors are being produced for a new Goddard Space Flight Center instrument. We have also produced models of a kilopixel detector grid and dummy multiplexer chip for bump bonding development. We present detector design overview, several unique fabrication highlights, and assembly technologies.

Paper Details

Date Published: 16 June 2006
PDF: 8 pages
Proc. SPIE 6275, Millimeter and Submillimeter Detectors and Instrumentation for Astronomy III, 62750B (16 June 2006); doi: 10.1117/12.672125
Show Author Affiliations
Christine A. Allen, NASA Goddard Space Flight Ctr. (United States)
John Abrahams, NASA Goddard Space Flight Ctr. (United States)
Dominic J. Benford, NASA Goddard Space Flight Ctr. (United States)
James A. Chervenak, NASA Goddard Space Flight Ctr. (United States)
David T. Chuss, NASA Goddard Space Flight Ctr. (United States)
Johannes G. Staguhn, NASA Goddard Space Flight Ctr. (United States)
Timothy M. Miller, NASA Goddard Space Flight Ctr. (United States)
S. Harvey Moseley, NASA Goddard Space Flight Ctr. (United States)
Edward J. Wollack, NASA Goddard Space Flight Ctr. (United States)


Published in SPIE Proceedings Vol. 6275:
Millimeter and Submillimeter Detectors and Instrumentation for Astronomy III
Jonas Zmuidzinas; Wayne S. Holland; Stafford Withington; William D. Duncan, Editor(s)

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